SEMI E187: Specification for Cybersecurity of Fab Equipment

What is SEMI E187?

SEMI E187 is a standard that provides baseline requirements to ensure semiconductor manufacturing equipment considers security by design and security protection in operation and maintenance.

Key Requirements of SEMI E187:

• Operating System Security
• Network Communication Security
• Network Configuration Management
• Vulnerability Mitigation
• Malware Scanning
• Anti-Malware Protection
• Access Control
• Logging Requirements

What to Expect from a SEMI E187 Assessment:

• Pre-assessment Preparation:
  • Review of existing security measures and documentation.
  • Identification of any gaps in compliance.
• Evaluation:
  • Verify that the relevant security guidelines, design documentation, or user documentation address the requirements of SEMI E187.
  • Detailed review of documented evidence.
  • Verify by test that the required security controls are functioning as expected.
  • Verification of generated logs to ensure requirements are met.
• Reporting:
  • Detailed report outlining compliance status.
  • Documentation to support end-user acceptance.